Silicon Nitride | Fine Ceramics (Advanced Ceramics) |
2020-10-1 · Therefore, the PMPH is fabricated; it uses silicon substrate coated on both sides with a silicon nitride insulation layer, piezoelectric material is deposited on top of the insulation layer using the RF sputtering technique, the interdigitated gold electrodes (IDEs) are deposited using the DC sputtering, and a proof mass is used to lower the resonance frequency.
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